Quasiribbon Vacuum Arc Ion Source “Raduga-6”

Abstract – The results on research and develop-ment of new modification of a high-current qua-siribbon repetitively-pulsed ion and plasma source “Raduga-6 ” on the basis of extended vacuum-arc evaporator generating plasma by a dc vacuum-arc are presented in the article. A new modification of a time-of-flight extended plasma filter was devel-oped and used for metal plasma filtering from mi-croparticle fraction. Research and development of a model of extended vacuum-arc evaporator and plasma filter adapted for it have been described. 1